- Despite its small size, it has a high exhaust speed.
- Compact size suitable for incorporating into equipment.
- The magnetic coupling structure eliminates oil leakage from the shaft seal, ensuring a long service life.
- Equipped with a check valve directly below the intake pipe, the inside of the pump is automatically opened to the atmosphere when the pump is stopped.
- The power cord inlet accommodates a variety of power cords.
- The forced oil supply mechanism stabilizes the pumping speed.
- It can operate from atmospheric pressure.
- For physical and chemical experiments, analytical equipment, and laser application equipment.
- Vacuum exhaust device, back of electron microscope.
- Semiconductor manufacturing equipment, sputtering equipment, vacuum deposition equipment.
- Vacuum dryer, freeze dryer.
- Leak detector.
Specifications in detail
Two-stage exhaust system
CE marking self-declaration product
TUV, cTUVus certified product
Supports different voltages from a single unit
Exhaust speed (L/min) 50/60Hz: 100/120
Ultimate pressure (Pa): 0.67
Power supply (V): Single phase 100
Overall width (mm): 150
Total length (mm): 413.5
Overall height (mm): 234.5
With thermal protector: Yes
Oil used: R-2
Power cord length (m): None
Intake diameter: KF-25
ULVAC GHD-101A
