- This is a vacuum pump that uses the reciprocating motion of a thin rubber membrane (diaphragm) to evacuate air.
- This is a dry vacuum pump that does not use oil or water in the gas contact parts. A thermal protector is built in for safety.
- The simple structure makes maintenance easy.
- Suction transport, suction fixation, vacuum tweezers.
- Analytical equipment, scientific and chemical equipment.
- Semiconductor inspection equipment.
- Device assembly.
- Automatic machines, packaging machines.
Specifications in detail
Ultimate pressure (KPa): 3.3
Intake and exhaust pipe diameter (mm): ODφ21 x IDφ15 (G1/2)
Maximum dimensions (mm): 388 (W) x 523.6 (L) x 274 (H)
Exhaust speed (L/min) 50/60Hz: 180/210
Ultimate pressure (Pa): 3.3 x 10 (to the power of 3)
Intake diameter (mm): 21
Power supply (V): Three-phase 200
Overall width (mm): 388
Total length (mm): 523.6
Height (mm): 274
Dimensions (mm): 388 x 523.6 x 274
ULVAC DAL-181D
