- This is a diaphragm type vacuum pump with improved ultimate pressure performance.
- By piping multiple pump heads in a three-stage system, we have achieved an ultimate pressure that cannot be achieved with conventional diaphragm types.
- Wide-range turbomolecular pumps, cryopump exhaust systems, and back pumps for mechanical booster pumps.
- Evacuate the load lock chamber.
- Suction transport and handling.
- For laser gas circulation and exhaust.
- Vacuum drying equipment, connected vacuum drying equipment
Specifications in detail
3-stage exhaust system
Supports different voltages from a single unit
Corrosion resistance of gas-contacting parts
Ultimate pressure (KPa): 0.2
Intake and exhaust pipe diameter (mm): ODφ10 x IDφ6 (Rc1/8)
Maximum dimensions (mm): 161(W) x 327(L) x 218(H)
Exhaust speed (L/min) 50/60Hz: 20/23
Ultimate pressure (Pa): 200
Intake diameter (mm): 10
Power supply (V): Single phase 100
Overall width (mm): 161
Total length (mm): 327
Height (mm): 217
Power cord length (m): 1.8
ULVAC DAU-20
