- This is a vacuum pump that uses the reciprocating motion of a thin rubber membrane (diaphragm) to evacuate air.
- This is a dry vacuum pump that does not use oil or water in the gas contact parts. A thermal protector is built in for safety.
- The simple structure makes maintenance easy.
- Suction transport, suction fixation, vacuum tweezers.
- Analytical equipment, scientific and chemical equipment.
- Semiconductor inspection equipment.
- Device assembly.
- Automatic machines, packaging machines.
Specifications in detail
Supports different voltages from a single unit (excluding DAL-181D/DAL-361S)
For low speed and low pressure
Exhaust speed (L/min) 50/60Hz: 60/72
Ultimate pressure (Pa): 21.3 x 10 (to the power of 3)
Intake diameter (mm): 9
Power supply (V): Single phase 100
Overall width (mm): 212
Total length (mm): 278
Overall height (mm): 224.5
Power cord length (m): 1.8
ULVAC DA-60S
