- This is a diaphragm pump for both pressure reduction and pressure increase.
- It can be used as a vacuum pump by piping to the intake port, and as a pressure pump by piping to the exhaust port.
- The applied pressure is 150kPa.
- Suction transport, suction fixation, vacuum tweezers.
- Analytical equipment, scientific and chemical equipment.
- Semiconductor inspection equipment.
- Device assembly.
- Automatic machines, packaging machines.
Specifications in detail
For both pressure reduction and pressure reduction
Pressurization pressure: 150kPa
One-stage exhaust system
Supports different voltages from a single unit
Pressurized pressure (gauge pressure) (MPa): 0.15
Exhaust speed (L/min) 50/60Hz: 30/36
Ultimate pressure (Pa): 33.3 x 10 (to the power of 3)
Intake diameter (mm): 9
Power supply (V): Single phase 100
Overall width (mm): 142
Total length (mm): 215.0
Overall height (mm): 180
Pressurization pressure (kPa): 150
Power cord length (m): 2
ULVAC DAP-30