- Uses ULVAC's original high-efficiency (IE3) multi-voltage motor.
- This is a highly reliable oil rotary vacuum pump with low vibration and noise.
- A forced oil supply system is used to prevent the exhaust speed from decreasing even at near atmospheric pressure.
- This is a rotary vane type pump that is easy to maintain.
- Vacuum deposition equipment for deposition, sputtering, etc.
- Analytical equipment, leak testing equipment.
- Various vacuum devices for vacuum drying, gas replacement, etc.
Specifications in detail
Totally enclosed fan-cooled three-phase multi-voltage motor 50Hz: 200-240/380-415V compatible, 60Hz: 200-240/380-460V compatible
Without thermal protector
Exhaust port: VG40 equivalent
Two-stage vane type
Exhaust speed (L/min) 50/60Hz: 1500/1800
Ultimate pressure (Pa): 0.67
Power supply (V): Three-phase multi
Overall width (mm): 280
Total length (mm): 831
Height (mm): 371
Oil used: R-72
Power cord length (m): None
Intake diameter: equivalent to VG50
ULVAC VD90C
